JPH0529474Y2 - - Google Patents

Info

Publication number
JPH0529474Y2
JPH0529474Y2 JP1986036144U JP3614486U JPH0529474Y2 JP H0529474 Y2 JPH0529474 Y2 JP H0529474Y2 JP 1986036144 U JP1986036144 U JP 1986036144U JP 3614486 U JP3614486 U JP 3614486U JP H0529474 Y2 JPH0529474 Y2 JP H0529474Y2
Authority
JP
Japan
Prior art keywords
dust
pellicle body
pellicle
antireflection layer
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986036144U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62149044U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986036144U priority Critical patent/JPH0529474Y2/ja
Publication of JPS62149044U publication Critical patent/JPS62149044U/ja
Application granted granted Critical
Publication of JPH0529474Y2 publication Critical patent/JPH0529474Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1986036144U 1986-03-14 1986-03-14 Expired - Lifetime JPH0529474Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986036144U JPH0529474Y2 (en]) 1986-03-14 1986-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986036144U JPH0529474Y2 (en]) 1986-03-14 1986-03-14

Publications (2)

Publication Number Publication Date
JPS62149044U JPS62149044U (en]) 1987-09-21
JPH0529474Y2 true JPH0529474Y2 (en]) 1993-07-28

Family

ID=30846276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986036144U Expired - Lifetime JPH0529474Y2 (en]) 1986-03-14 1986-03-14

Country Status (1)

Country Link
JP (1) JPH0529474Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237450A (ja) * 1984-05-11 1985-11-26 Asahi Chem Ind Co Ltd 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法

Also Published As

Publication number Publication date
JPS62149044U (en]) 1987-09-21

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